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(Metal stencil mask for nanoscale implantation)
3rd International Conf. on Physics at Surfaces and Interfaces. 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:56:07 +0900Updated at: 2017-07-10 21:48:16 +0900