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溝形状と単結晶アルミナ基板の歪解放との関係
(Effect of trench shapes on the strain release of epitaxial alumina)
第75回応用物理学会秋季学術講演会. 2014.
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Created at: 2017-02-14 11:02:57 +0900Updated at: 2017-07-10 21:56:42 +0900