HOME > Presentation > Detail超高感度ナノメカニカル膜型表面応力センサー(MSS)の開発(Development of highly sensitive nanomechanical membrane-type surface stress sensor (MSS))吉川 元起. Award Ceremony of Tsukuba Encouragement Prize. 2013. InvitedNIMS author(s)YOSHIKAWA, GenkiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 10:52:17 +0900Updated at: 2024-03-05 11:44:52 +0900