HOME > Presentation > Detail基板加熱によって作製したTi-Ni-Cu形状記憶合金薄膜アクチュエータ(Ti-Ni-Cu thin-film SMA actuators formed on heated substrates by sputtering)石田 章, 佐藤 守夫. 日本金属学会2007年度秋期大会. 2007.NIMS author(s)ISHIDA, AkiraFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2017-01-08 04:36:45 +0900 Updated at :2017-07-10 19:56:47 +0900