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基板加熱によって作製したTi-Ni-Cu形状記憶合金薄膜アクチュエータ
(Ti-Ni-Cu thin-film SMA actuators formed on heated substrates by sputtering)

日本金属学会2007年度秋期大会. 2007.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at :2017-01-08 04:36:45 +0900 Updated at :2017-07-10 19:56:47 +0900

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