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SiO2/4H-SiC界面における界面準位と界面構造の相関
(Atomic structures and interface states density at SiO2/4H-SiC interface )
Symposium on Practical Surface Analysis 2020. 2020.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-12-10 03:00:23 +0900Updated at: 2020-12-10 03:00:23 +0900