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シリコンナノワイヤ中のドーパント原子の偏析挙動と動径分布
(Segregation behaviors and radial distribution of dopant atoms in silicon nanowires)
2011MRS Fall Meetings. 2011.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:05:59 +0900Updated at: 2017-07-10 21:08:32 +0900