HOME > Presentation > DetailHybrid bonding in ambient air – a feasible tool for mixed integrations(大気圧ハイブリッド・ボンディングで創る有機・無機材料混載基板)SHIGETOU, Akitsu. IEEE CPMT Society Evening Meeting. 2012. InvitedNIMS author(s)SHIGETOU, AkitsuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 05:39:12 +0900Updated at: 2024-03-05 11:44:11 +0900