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SiO2/SiC interface engineering via low temperature NO oxynitridation of SiC surface feasible with Si device fabrication equipment
The 22nd International Conference on Silicon Carbide and Related Materials (ICSCRM 2025). September 14, 2025-September 19, 2025.
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Created at: 2025-09-30 03:14:27 +0900 Updated at: 2025-09-30 03:14:27 +0900