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Plasma-assisted atomic layer deposition of highly ion-conducting lithium phosphorus oxynitride thin films
37th International Microprocesses and Nanotechnology Conference (MNC 2024). November 12, 2024-November 15, 2024.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2024-11-27 17:37:05 +0900Updated at: 2024-11-27 17:37:05 +0900