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PLD法で成膜したアモルファスIn-Ga-Zn-O薄膜における電荷補償と水素によるパッシベーション効果
(Charge compensation and hydrogen passivation observed in a-In-Ga-Zn-O films deposited by pulsed laser deposition in vacuum )
第61回応用物理学会春季学術講演会. March 17, 2014-March 20, 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:58:30 +0900Updated at: 2018-06-05 13:31:31 +0900