HOME > 口頭発表 > 書誌詳細Cathodoluminesence characterization of nanoscale silicon chips fabricated by diamond turning小野寺 尚志, 閻紀旺, 関口 隆史. Joint Symposium on Electronic Materials. 2009.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-14 11:31:23 +0900更新時刻: 2017-07-10 20:35:20 +0900