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酸化中のシリコン表面のストレス測定
(Stress measurements of the silicon surface during oxidation )
第１８回表面科学ヨーロッパ会議. 1999.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:08:28 +0900Updated at: 2017-07-10 17:58:27 +0900