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スパッタ法で作製したAlN薄膜の強誘電体特性評価

第70回応用物理学会春季学術講演会. March 15, 2023-March 18, 2023.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-10-14 03:08:36 +0900Updated at: 2023-10-14 03:08:36 +0900

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