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種結晶を用いて作製したシリコン基板中の結晶欠陥に関する評価(2)
(Evaluation of crystalline defect in silicon substrate grown by seeding cast technique)
応用物理学会学術講演会. 2011.
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Created at: 2017-02-14 11:20:12 +0900Updated at: 2017-07-10 21:11:39 +0900