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酸化タングステン薄膜のエピタキシャル製膜とガス応答特性
(Epitaxial growth of WO3 films and their gas sensing properties)
2022年第69回応用物理学会春季学術講演会. 2022.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-05-17 03:13:16 +0900Updated at: 2022-05-17 03:13:16 +0900