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(110)配向ScN薄膜のヘテロエピタキシャル成長とその電気特性
(Heteroepitaxial growth and electric properties of (110)-oriented scandium nitride films)

STAC-10. August 01, 2017-August 03, 2017.

NIMS author(s)


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    Created at: 2017-06-06 22:35:55 +0900 Updated at: 2018-06-05 14:09:28 +0900

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