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シリコンナノワイヤ中のP原子の熱酸化過程での偏析挙動
(Segregation behavior of phosphorus atoms in silicon nanowires during thermal oxidation)
第60回応用物理学会春季学術講演会. 2013.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:45:21 +0900Updated at: 2017-07-10 22:22:12 +0900