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AuthorCHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, NEMOTO, Yoshihiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Keisaku Yamada, CHIKYOW, Toyohiro.
TitleEBIC and TEM Investigations of Current Leakage Sites in High-k Gate Stacks
Event nameMANA International Symposium 2010
Year of publication2010
LanguageEnglish
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