HOME > Presentation > Detail(EBIC and TEM Investigations of Current Leakage Sites in High-k Gate Stacks)陳 君, 関口 隆史, 深田 直樹, 高瀬 雅美, 根本 善弘, 蓮沼隆, 山部紀久夫, 佐藤基之, 山田啓作, 知京 豊裕. MANA International Symposium 2010. 2010.NIMS author(s)CHEN, JunFUKATA, NaokiNEMOTO, YoshihiroCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 10:57:52 +0900Updated at: 2017-07-10 20:45:11 +0900