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(EBIC and TEM Investigations of Current Leakage Sites in High-k Gate Stacks)

陳 君, 関口 隆史, 深田 直樹, 高瀬 雅美, 根本 善弘, 蓮沼隆, 山部紀久夫, 佐藤基之, 山田啓作, 知京 豊裕.
MANA International Symposium 2010. 2010.

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    Created at: 2017-02-14 10:57:52 +0900Updated at: 2017-07-10 20:45:11 +0900

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