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High-temperature diamond MEMS magnetic sensor with on-chip actuation and sensing

ZHANG, Zilong, CHEN, Guo, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong.
第70回応用物理学会春季学術講演会. March 15, 2023-March 18, 2023.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2023-11-30 03:15:58 +0900 Updated at: 2023-11-30 03:15:58 +0900

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