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電荷移動型分子動力学法によるSi/SiO2界面酸化シミュレーション
(Charge-transfer type classical molecular dynamics for oxidation of Si/SiO2 interface)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:30:46 +0900Updated at: 2017-07-10 22:18:46 +0900