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二層 InSiO 薄膜トランジスタ の水素還元とオゾン酸化効果
(Effect of Hydrogen and Oxon Aneeling in Double-layer InSiO Thin-Film Transistors)

第63回応用物理学会春季学術講演会. March 19, 2016-March 22, 2016.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2017-02-14 10:56:45 +0900 Updated at: 2017-07-10 22:22:08 +0900

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