HOME > Presentation > DetailStudy of TMB/CH4/O2/H2 Plasmas for Diamond Doped Multilayersフィオーリ ジヨーンイヴ アレクサンドレ, 寺地 徳之. JSAP Autumn Meeting 2016. 2016.NIMS author(s)FIORI, Jean-Yves AlexandreTERAJI, TokuyukiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 11:46:34 +0900Updated at: 2017-07-10 22:27:19 +0900