HOME > Presentation > DetailHigh-k/III-V界面制御に向けたモニタリング法の検討:反射率差分光(RDS)の適用可能性(Monitoring Technique for Controlling High-k/III-V Interfaces: Applicability of Reflectance Difference Spectroscopy (RDS))安田哲二, 宮田典幸, 大竹 晃浩. 第54回応用物理学関係連合講演会. 2007.NIMS author(s)OHTAKE, AkihiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2017-02-14 11:44:31 +0900 Updated at :2017-07-10 19:57:15 +0900