SAMURAI - NIMS Researchers Database

HOME > Presentation > Detail

High-k/III-V界面制御に向けたモニタリング法の検討:反射率差分光(RDS)の適用可能性
(Monitoring Technique for Controlling High-k/III-V Interfaces: Applicability of Reflectance Difference Spectroscopy (RDS))

安田哲二, 宮田典幸, 大竹 晃浩.
第54回応用物理学関係連合講演会. 2007.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at :2017-02-14 11:44:31 +0900 Updated at :2017-07-10 19:57:15 +0900

    ▲ Go to the top of this page