HOME > Presentation > Detail
コンビナトリアルスパッタ成膜法によるMgSiSn系薄膜のナノ構造制御と熱電特性
(Thermoelectric property of nanostructured Mg/Si/Sn thin films controlled by combinatorial sputter coating method)
2023年第70回応用物理学会春季学術講演会. March 15, 2023-March 18, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-12-22 09:27:51 +0900 Updated at: 2023-12-22 09:27:51 +0900