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有機金属化学堆積法で成長したZnO薄膜の光学特性
(Photoluminescence property of ZnO film grown by metalorganic chemical vapor deposition)
Author(s) | 角谷 正友, 渡邊 賢司, 藤本 英司, 鯉沼 秀臣. |
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Event name | IEEE Nanotechnology Materials and Devices Conference 2008 |
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Year of publication | 2008 |
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Language | Japanese |
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