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HfO2基強誘電体の相安定性と厚膜化
(Preparation of thick HfO2 film through considering phase stability)
第４回元素戦略シンポジウム. February 03, 2020-February 04, 2020.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-08-05 03:00:18 +0900Updated at: 2020-08-05 03:00:18 +0900