SAMURAI - NIMS Researchers Database

HOME > Presentation > Detail

HfO2基強誘電体の相安定性と厚膜化
(Preparation of thick HfO2 film through considering phase stability)

清水 荘雄, 三村 和仙, 舟窪 浩.
第4回元素戦略シンポジウム. February 03, 2020-February 04, 2020.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2020-08-05 03:00:18 +0900Updated at: 2020-08-05 03:00:18 +0900

    ▲ Go to the top of this page