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Effect of post-growth annealing with trimethylgallium on structural quality of AlN layers grown on c-plane sapphire substrate by MOVPE

The 14th International Conference on Nitride Semiconductors (ICNS-14). November 12, 2023-November 17, 2023.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-11-27 14:51:22 +0900Updated at: 2023-11-27 14:51:22 +0900

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