Ga diffusion profile and electrical properties of GaN capacitors with high-k gate insulators

NABATAME, Toshihide, SAWADA, Tomomi, IROKAWA, Yoshihiro, YASUFUKU, Hideyuki, NISHIO, Mitsuaki, KAWADA, Satoshi, KOIDE, Yasuo, TSUKAGOSHI, Kazuhito.

THERMEC 2023 International Conference on Processing & Manufacturing of Advanced MaterialsProcessing, Fabrication, Properties, Applications. July 03, 2023-July 07, 2023. Invited

NIMS author(s)

NABATAME, Toshihide
IROKAWA, Yoshihiro
YASUFUKU, Hideyuki
NISHIO, Mitsuaki
KAWADA, Satoshi
KOIDE, Yasuo
TSUKAGOSHI, Kazuhito

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2023-07-27 11:27:56 +0900Updated at: 2024-01-09 03:09:04 +0900