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APT and STEM based defects analysis in Mg-implanted GaN layers with varying Mg concentrations

KUMAR, Ashutosh, UZUHASHI, Jun, OHKUBO, Tadakatsu, Ryo Tanaka, Shinya Takashima, Masaharu Edo, HONO, Kazuhiro.
30th International Conference on Defects in Semiconductors. 2019.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2019-08-03 03:00:20 +0900Updated at: 2019-08-03 03:00:20 +0900

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