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Effects of Thermal Annealing on Elimination of Deep Defects in Amorphous In-Ga-Zn-O thin films

Tank.Hao-Chun, Ide.Keisuke, 上田 茂典, Hiramatsu.Hidenori, 大橋 直樹, 雲見日出也, 細野秀雄, 神谷利夫.
The 9th International Symposium on Transparent Oxide and Related. October 19, 2015-October 21, 2015.

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    Created at: 2017-02-14 10:53:18 +0900Updated at: 2017-07-10 22:16:23 +0900

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