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電子ビームがSiO2の薄膜に与える損傷(VAMAS-SCAラウンドロビン試験報告)
(Electron Beam Damages on SiO2 Thin Films (VAMAS-SCA Round Robin))
PSA-13. 2013.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:41:45 +0900Updated at: 2017-07-10 21:45:46 +0900