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AuthorNaoyuki Saito, Masanori Seoka, Shinya Ishida, Shigeki Yokono, FUKATA, Naoki, CHEN, Jun, SEKIGUCHI, Takashi, HISHITA, Shunichi, kouichi Murakami.
TitleSiナノワイヤへイオン注入したBの電気的活性化
(Electrical activation of boron in Si nanowires implanted with boron ion)
Event name春季第56回応用物理学会学術講演会
Year of publication2009
LanguageJapanese
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