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(AB INITIO STUDY OF DEPOSITION OF CUBIC BORON NITRIDE THIN FILMS)

古賀 裕明, 宮崎 剛, 渡邊聡, 大野 隆央.
16th INTERNATIONAL VACUUM CONGRESS. 2004.

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    Created at :2017-02-25 00:44:11 +0900 Updated at :2017-07-10 19:05:52 +0900

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