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酸素プラズマによる四面体アモルファスカーボン表面層の制御
(Surface Layer Control of Tetrahedral Amorphous Carbon by Oxygen Plasma)
6th International Conference on Reactive Plasmas and 23rd Sympos. 2006.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:06:36 +0900Updated at: 2017-07-10 19:26:11 +0900