HOME > Presentation > Detail
Impact of ALD-ZrO2 nucleation layers on leakage current properties and dielectric constant of ferroelectric HfxZr1−xO2-thin films
36th International Microprocesses and Nanotechnology Conference (MNC 2023). November 14, 2023-November 17, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2024-01-09 03:10:46 +0900Updated at: 2024-01-09 03:10:46 +0900