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薄膜の実効的ヤング率と膜質の関係
(Active Youngs modulus of thin film compared with the structure.)
第27回表面科学講演大会. November 01, 2007-November 03, 2007.
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Created at: 2017-01-08 03:47:02 +0900Updated at: 2017-07-10 20:03:58 +0900