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(Al,Sc)N 薄膜中に含まれる不純物酸素の光電子分光評価
(X-ray photoelectron spectroscopy analyses of oxygen impurities in (Al,Sc)N films)

第42回電子材料研究討論会. November 10, 2022-November 11, 2022.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-01-05 12:15:42 +0900Updated at: 2023-01-05 12:15:42 +0900

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