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4H-SiC(0001)面の酸化過程の動的シミュレーション：Si面とC面
(Molecular dynamics simulations for oxidation processes of 4H-SiC(0001): Si and C surfaces)
第19回ゲートスタック研究会. 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 05:32:55 +0900Updated at: 2017-07-10 21:46:59 +0900