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AuthorSeoka Masanori, Satoshi Matsushita, FUKATA, Naoki, Takao Tsurui, CHEN, Jun, SEKIGUCHI, Takashi, Noriyuki Uchida, kouichi Murakami.
TitleSiナノワイヤへのPドーピングと熱酸化によるPの偏析挙動
(P doping in silicon nanowires and segregation of P atoms during oxidation)
Event nameナノ学会第5回大会
Year of publication2007
LanguageJapanese
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