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ガス加熱トライオードプラズマCVD法によるSi表面パシベーション
(Si surface passivation by triode-type plasma-enhanced CVD with thermally-energized film-precursors)
第65回応用物理学会春季学術講演会. March 17, 2018-March 20, 2018.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-04-11 22:38:38 +0900Updated at: 2018-06-05 14:19:38 +0900