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Siナノワイヤ中への不純物ドーピングと不純物の偏析挙動
(Doping and segregation of impurity atoms in silicon nanowires)

深田 直樹, 瀬岡雅典, 齋藤直之, 陳 君, 関口 隆史, 村上浩一.
ICDS25. 2009.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2017-02-14 11:16:01 +0900Updated at: 2017-07-10 20:33:03 +0900

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