HOME > Presentation > DetailSiナノワイヤ中への不純物ドーピングと不純物の偏析挙動(Doping and segregation of impurity atoms in silicon nanowires)深田 直樹, 瀬岡雅典, 齋藤直之, 陳 君, 関口 隆史, 村上浩一. ICDS25. 2009.NIMS author(s)FUKATA, NaokiCHEN, JunFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 11:16:01 +0900Updated at: 2017-07-10 20:33:03 +0900