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Sensing the point defects by single-crystal diamond MEMS resonators

The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023). June 25, 2023-June 29, 2023.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-07-19 10:52:07 +0900Updated at: 2023-07-19 10:52:07 +0900

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