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単結晶(Al,Sc)N薄膜の合成と強誘電体特性評価
(Fabrication and ferroelectric evaluation of (Al,Sc)N thin films)
第41回電子材料研究討論会. November 04, 2021-November 05, 2021.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2021-11-16 03:39:10 +0900Updated at: 2021-11-16 03:39:10 +0900