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ＥＢＩＣとＴＥＭによってHigh-kゲートスタック構造のリーク電流欠陥の研究
(EBIC and TEM Investigations of Current Leakage Sites in High-k Gate Stacks)
第10回High-kネット報告会. 2010.
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Created at: 2017-02-14 11:02:04 +0900Updated at: 2017-07-10 20:44:59 +0900