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レーザ加熱型MOCVD装置を用いた狭い温度範囲でのZnO膜のラテラル成長
(Very narrow temperature window for lateral growth of ZnO thin films by laser heating metalorganic chemical vapor deposition)
The 6th Asia-Pacific Workshop on Widegap Semiconductors. 2013.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:46:56 +0900Updated at: 2017-07-10 21:37:35 +0900