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WOCl4をプリカーサに用いたWS2単層膜のガス原料CVD
(Gas source CVD of WS2 monolayer using WOCl4 as precursor)
第79回応用物理学会秋季学術講演会. 2018.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-06-28 16:44:27 +0900Updated at: 2018-06-28 16:44:27 +0900