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Theoretical Studies for the Effect of Nitrogen Incorporation into Hf-based High-k Gate

梅澤 直人, 白石 賢二, 渡部 平司, 鳥居和功, 赤坂泰志, 犬宮誠治, マウエボエロ, 上殿 明良, 宮崎 誠一, 大野 隆央, 奈良安雄, 山田 啓作, 知京 豊裕.
International Workshop on Nano CMOS. 2006.

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    Created at: 2017-01-08 04:02:44 +0900Updated at: 2017-07-10 19:33:07 +0900

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