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Halide Vapor Phase Epitaxy of meta-stable Ga2O3
(準安定Ga2O3のHVPE成長)
CSW2019. 2019. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2019-08-08 03:15:19 +0900Updated at: 2024-03-05 12:21:03 +0900