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サファイアm面基板上へのScN薄膜のヘテロ成長とその電気特性
(Heteroepitaxial growth and electric properties of scandium nitride films on m-face sapphire substrates)
E-MRS 2014 SPRING MEETING. May 26, 2014-May 30, 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:24:20 +0900Updated at: 2017-07-10 21:48:40 +0900