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電荷移動型分子動力学法による4H-SiCの熱酸化シミュレーショ
(Thermal oxidation simulation of 4H-SiC by charge-transfer type molecular dynamics)
第64回応用物理学会春季学術講演会. 2017.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-04-18 22:55:20 +0900Updated at: 2018-06-05 14:07:29 +0900